中国有色金属学报(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 19 Special 1 September 2009 |
（1. Department of Nano Fusion Technology, Pusan National University, Miryang, 627-706, Korea;
2. Department of Mechanical Design Engineering, Chosun University, Gwangju, 501-759, Korea;
3. Department of Nanosystem and Nanoprocess Engineering, Pusan National University, Miryang, 627-706, Korea）
Abstract:One of the ultra-precision machining methods was adapted for brittle material as well as soft material by using multi- arrayed diamond tips and high speed spindle. Conventional machining method is too hard to control surface roughness and surface texture against brittle material because the particles of grinding tools are irregular size and material can be fragile. Therefore, we were able to design tool paths and machine controlled pattern on surface by multi-arrayed diamond tips with uniform size made in MEMS fabrication and high speed spindle, and the maximum speed was about 3×105 r/min. We defined several parameters that can affect the machining surface. Those were multi-array of diamond tips (n×n), speed of air spindle and feeding rate. The surface roughness and surface texture can be controlled by those parameters for micro machining.
Key words: brittle material; surface roughness; surface texture; multi-arrayed tips; micro machining
