Abstract:TiO₂ nanotube layers can be formed with titanium in the electrolytes containing fluoride by electrochemical method. The role of fluoride ion, the crystallinity of the anodic oxide, and the chemical state were investigated. The results show the anodic film is composed of oxide and a little amount of hydroxide. The presence of F⁻ ions leads to chemical dissolution of Ti oxide layer and prevents hydroxide precipitation. Consequently, chemical dissolution rate increases with increasing the fluoride content in the range of 0−2% (in mass fraction) because F⁻ ions in electrolyte attack the interface and allow the ions of the electrolyte to easily penetrate into the interface. The as-anodized TiO₂ nanotubes exhibit an amorphous structure. Thermally treated nanotubes are composed of mixtures of the anatase and rutile phases.

Key words: TiO₂; nanotube; anodization; fluoride