中国有色金属学报(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 16 No. 5 October 2006 |
（College of Mechanical Engineering, South China University of Technology,
Guangzhou 510640, China）
Abstract: BaTiO3 ferroelectric films were prepared on titanium substrate by microarc oxidation(MAO) technology. The effects of current density and electrolytic concentration on chemical composition, crystal phase, and surface morphologies of the films were characterized by XRD, SEM and EDS. The results show that the films made by MAO technology have a two layer structure with a good combinability between them and with the substrate. The inner layer is composed of Ti oxide without Ba, and the outer layer is mainly composed of BaTiO3 and Ti oxide. The compactability of the films decreases and the surface roughness of the films increases with the increase of current density and electrolytic concentration. Films with a high content of primitive tetragonal and end-centered orthorhombic BaTiO3 are obtained in 0.2 mol/L Ba(OH)2 solution with current density of 5 A/cm2 after 18 min.
Key words: microarc oxidation; ferroelectric film; BaTiO3; structural characteristics
